Ultrasonic Ceramic Linear Motors / Actuators



High Force Ceramic Actuators     Linear Tables     Motorized Linear Actuators    Flexure-Guided Actuators    
Piezo Actuators     Vacuum Actuators & Custom Actuators     Controllers for Linear Actuators


PILine® Ultrasonic Piezo Ceramic Motors can provide rapid acceleration and very high speed. They are are based on a patented ceramic drive developed by PI. At the heart of each motor / actuator is a rectangular piezo ceramic plate (the stator), segmented by two electrodes. Depending on the desired direction of motion, the left or right electrode of the piezoceramic plate is excited to produce high-frequency eigenmode oscillations to hundreds of kilohertz (ultra-sonic).
A motion transfer tip (pusher) attached to the plate moves along an inclined linear path at the eigenmode frequency and couples nanometric movements at high frequency into a ceramic runner (rod).
This princople also works for circular runners in rotary actuators.

These ceramic motors provide lower resolution (to 50 nanometers) and lower forces (to 10 N) than PiezoWalk® type ceramic motors, but much higher velocities (to 500 mm/sec). They are very stable and self-clamping at rest with no heat generation or servo dither.



M-663 Ultrasonic Linear Motor, Closed-Loop, Compact Design

P-663 Compact Linear Motor Table
  • Patented Ultrasonic Piezo Linear Motor, Fast, Precise and Self Locking at Rest Max. Velocity 250 mm/second, Rapid Acceleration
  • Smallest Translation Table with Closed-Loop Linear Motor and Encoder
  • 18 mm Positioning range
  • 0.1 µm Closed-Loop Resolution with Direct Metrology Linear Encoder
  • Vacuum-Compatible Versions Available
  • Very Compact XY Combinations

This small, closed-loop micropositioning table is driven by a very compact ultrasonic motor providing high velocity to 400 mm/second and resolution of 0.1 microns. An integrated linear encoder guarantees high precision and repeatability.

Specs, Drawings, Part numbers



M-664 Closed-Loop Ultrasonic Linear Motor


  • Patented Ultrasonic Piezo Linear Motor, Fast, Precise and Self Locking at Rest
  • 25 mm Positioning range, 0.1 µm Resolution, 400 mm/second
  • 15 mm Ultra-Low Profile
  • Direct Metrology Linear Encoder
  • High Guiding Accuracy with Crossed Roller Bearings
  • Compact XY Combinations

This small, closed-loop linear micropositioning table provides an extremely low profile of only 15 mm. An integrated linear encoder guarantees high resolution of 100 nanometers and high repeatability.

Specs, Drawings, Part numbers P-664 Linear Motor table



High Force Ceramic Actuators     Linear Tables     Motorized Linear Actuators    Flexure-Guided Actuators    
Piezo Actuators     Vacuum Actuators & Custom Actuators     Controllers for Linear Actuators