Ultrasonic Ceramic Linear Actuators

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PILine® Ultrasonic Piezo Ceramic Motors can provide rapid acceleration and very high speed. They are are based on a patented ceramic drive developed by PI. At the heart of each motor / actuator is a rectangular piezo ceramic plate (the stator), segmented by two electrodes. Depending on the desired direction of motion, the left or right electrode of the piezoceramic plate is excited to produce high-frequency eigenmode oscillations to hundreds of kilohertz (ultra-sonic).
A motion transfer tip (pusher) attached to the plate moves along an inclined linear path at the eigenmode frequency and couples nanometric movements at high frequency into a ceramic runner (rod).
This princople also works for circular runners in rotary actuators.

These ceramic motors provide lower resolution (to 50 nanometers) and lower forces (to 10 N) than PiezoWalk® type ceramic motors, but much higher velocities (to 500 mm/sec). They are very stable and self-clamping at rest with no heat generation or servo dither.



M-272 Linear Shaft Motor with Ultrasonic Ceramic Drive for Automation
M-272 PILine Drive for Automation
  • Fast: Velocity to 200 mm/second
  • Integrated Linear Encoder
  • Integrated Linear Guiding System
  • Force Generation up to 8 N
  • Self Locking at Rest w/ No Heat Generation

These ultrasonic-motor based piezo linear drives provide an alternative to classical motors when small dimensions and/or high speed are important.

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RodDrive Ultrasonic Motor Actuators
  • Fast: up to 500 mm/sec
  • Positioning range up to 150 mm
  • Min. Incremental Motion to 50 nanometers
  • Self Locking at Rest w/ No Heat Generation

These ultrasonic-motor based piezo linear drives provide an alternative to classical motors when small dimensions and/or high speed are important. They consist of a ceramic rod (runner) preloaded by piezo linear motors from both sides. Depending on the way of integration, either the rod or the motor block can be clamped.

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M-674 Ultrasonic Linear Actuator





P-661 Small Ultrasonic Piezo Linear Motor
P-661 Ultrasonic Linear Motor
  • Fast: Velocity to 500 mm/second, Acceleration to 5 g
  • Patented Principle
  • Min. Incremental Motion to 0.05 µm
  • Self-Locking to 1.5 N
  • No Electro-Magnetic Fields
  • MTBF 20,000 h

PILine® ultrasonic ceramic motors are very compact, yet generate high driving and holding forces (self locking at rest). The patented drive principle is based a piezoceramic plate, which is excited to produce high-frequency (100 kHz range) eigenmode oscillations. A motion transfer tip attached to the plate moves along an inclined linear path at the eigenmode frequency, a few nanometers each cycle. Through its contact with the ceramic runner bar coupled to the positioning mechanics, motion is achieved.

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M-661 Small Linear Table with Ultrasonic Linear Motors
  • Patented Ultrasonic Piezo Linear Motor, Fast, Precise and Self Locking at Rest Smallest Linear Table with High Speed Ultrasonic Linear Motor
  • Positioning ranges to 20 mm
  • Fast: Velocity to 500 mm/second, Acceleration to 5 g
  • Min. Incremental Motion to 50 nm
  • XY-Combination Possible
  • MTBF 20.000 h
  • Vacuum Versions to 10-7 hPa

These low-profile, miniaturized translation tables provide acceleration to 5g with millisecond responsiveness and high speed to 500 mm/sec in an extremely compact package. A similar closed-loop table with optical linear encoder is available as model M-663.

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M-661 and M-662 Miniature Linear Motor table





M-663 Small Closed-Loop Ultrasonic Linear Motor Table
P-663 Compact Linear Motor Table
  • Patented Ultrasonic Piezo Linear Motor, Fast, Precise and Self Locking at Rest Max. Velocity 400 mm/second, Rapid Acceleration
  • Smallest Translation Table with Closed-Loop Linear Motor and Encoder
  • 19 mm Positioning range
  • 0.1 µm Closed-Loop Resolution with Direct Metrology Linear Encoder
  • Vacuum-Compatible Versions Available
  • Very Compact XY Combinations

This small, closed-loop micropositioning table is driven by a very compact ultrasonic motor providing high velocity to 400 mm/second and resolution of 0.1 microns. An integrated linear encoder guarantees high precision and repeatability.

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M-664 Closed-Loop Ultrasonic Linear Motor Table
  • Patented Ultrasonic Piezo Linear Motor, Fast, Precise and Self Locking at Rest
  • 25 mm Positioning range, 0.1 µm Resolution, 400 mm/second
  • 15 mm Ultra-Low Profile
  • Direct Metrology Linear Encoder
  • High Guiding Accuracy with Crossed Roller Bearings
  • Compact XY Combinations

This small, closed-loop linear micropositioning table provides an extremely low profile of only 15 mm. An integrated linear encoder guarantees high resolution of 100 nanometers and high repeatability.

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P-664 Linear Motor table




High Force Ceramic Actuators     Linear Tables     Motorized Linear Actuators    Flexure-Guided Actuators    
Piezo Actuators     Vacuum Actuators & Custom Actuators     Controllers for Linear Actuators