Precision Vacuum Actuators



High Force Ceramic Actuators     Ultrasonic Motor Linear Actuators     Linear Tables    Motorized Linear Actuators   
Flexure-Guided Actuators     Piezo Actuators     Controllers for Linear Actuators
Brochure: Engineered Vacuum / UHV Motion Control Systems, PI miCos.



Ceramic Encapsulated Piezo Stack Vacuum Actuators

P-855 PICMA Linear Actuators
  • Piezo Actuators are intrinsically vacuum compatible, because of their ceramic nature.

PI piezo actuators are designed to combine ultra-high performance with long lifetime in industrial and scientific applications.

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M-227K Motorized Micrometer Vacuum Actuator


  • Compact Actuator Design
  • Vacuum Compatible up to 10-6 hPa
  • Non-Rotating Tip
  • Closed-Loop DC-Motors

The M-227KVLA Vacuum Compatible linear actuator is equipped with rotary encoder and DC-motor with gearhead

PDF Brochure | Specs, Drawings, Part numbers
M-227K High-Resolution DC-Mike Linear Actuator





NEXACT® Vacuum Actuator / Linear Manipulator, Piezo Stepper Actuator

N-380, N-381 NEXACT® Linear Actuator
  • 30 mm Travel Range
  • Long-Life Piezo Stepping Drive, Ideal for Micro- and Nano-Manipulation
  • Integrated Linear Encoder Option
  • Very High Acceleration, e.g. for Cell Penetration
  • Two Operating Modes: Continuous Stepping Mode and Continuously Variable, High-Dynamics Analog Mode for 30 pm Resolution**
  • Up to 10 N Force Generation
  • Self-Locking at Rest, no Heat Generation
  • Smooth Motion, no Closed-Loop Jitter
  • Vacuum-Compatible and Non-Magnetic Versions

N-381 piezo stepper linear actuator for sample positioning and manipulation provides long travel, high speed and very high resolution. Shown with C-861 controller

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OEM Miniature Vacuum Actuator Linear Motor with PiezoWalk Drive


  • Resolution to 0.03 nm
  • 10 to 125 mm Travel Ranges
  • Compact and Cost-Effective Design
  • To 10 N Push/Pull Force
  • Low Operating Voltage (40V)
  • Self-Locking at Rest, No Head Dissipation, Nanometer Stability
  • Non-Magnetic and Vacuum-Compatible Working Principle

N-310 PiezoWalk® linear drives feature travel ranges of up to 125 mm and push/pull force capacities to 10 N in a compact package of only 25 x 25 x 12 mm. With their high resolution, NEXACT® drives, are ideal for high-precision positioning over long travel ranges. The N-310 can be operated in open-loop and closed-loop mode (with the addition of an external position sensor). A variety of NEXACT® controllers facilitates the integration into micro- or nanopositioning applications.

PDF Brochure | Specs, Drawings, Part numbers
N-310 NEXACT® OEM Miniature Linear Motor/Actuato





N-111 OEM Linear Vacuum Actuator PiezoWalk® Principle

N-111 NEXLINE® OEM Linear Actuator
  • Non-Magnetic and Vacuum-Compatible Working Principle
  • Cleanroom Compatible
  • Travel Range 10 mm
  • Resolution to 0.025 nm
  • to 70 N Holding Force, to 50N Force Generation
  • Self Locking at Rest, No Heat Generation

The N-111 NEXLINE® OEM linear actuator operating principle is based on coordinated motion of a number of highly preloaded linear and shear piezo elements acting on a runner. NEXLINE® drives thus combine long travel ranges with piezo-class precision. Closed-loop and open loop models are available. In open-loop operation position resolution down to 25 pico-meters can be achieved.

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N-216 PiezoWalk High-Force Ceramic Vacuum Actuator / Linear Motor


  • Cleanroom Compatible
  • Non-Magnetic and Vacuum-Compatible Working Principle
  • 800 N Holding Force
  • Travel Range 20 mm
  • Resolution to 0.03 nm
  • Self Locking at Rest

NEXLINE® drives combine long travel ranges with piezo-class precision. The N-216 is a high-end actuator for high-energy physics, semiconductor and nanotechnology applications with extreme precision and life time requirements.




PDF Brochure | Specs, Drawings, Part numbers

N-216 NEXLINE® Linear Motor/Actuator





M-663K Miniature Rodless Vacuum Actuator / Positioning Table with Ceramic Motor

M-663K Vacuum-Compatible, Piezo-Motor-Driven Miniature Translation Table
  • Smallest High-Speed Positioning Table with Closed-Loop Linear Motor and Encoder
  • Travel Range 19 mm
  • Vacuum Compatible up to 10-6 hPa
  • Direct Metrology Linear Encoder
  • Resolution 0.1 µm
  • XY Combinations

The M-663KVLS Linear table is vacuum compatible
to 10-6 hPa

Request Information, Quote on M-663 Vacuum Stage




P-733.2UD Non-Magnetic XY Piezo Flexure Table for UHV to 10-9 hPa


  • Resolution to 0.1 nm with Capacitive Sensors, Ideal for Super-Resolution Microscopy
  • Travel Ranges to 100 x 100 µm in X,Y & to 10 µm in Z
  • Frictionless, High-Precision Flexure Guiding System
  • High-Speed Versions with Direct Drive
  • Parallel Kinematics for Better Multi-Axis Accuracy and Dynamics
  • Parallel Metrology for Active Trajectory Control
  • Clear Aperture for Microscopy

The P-733 XY piezo stage provides very high-dynamics and resolution to 0.1 nanometers. It can be used for semiconductor metrology, AFM, scanning and ultra-high precision alignment applicaitons.

PDF Brochure | Specs, Drawings, Part numbers
P-733.2UD Non-Magnetic XY Piezo Scanning Stage





Hexapod 6-Axis-Positioning Platform Precision Parallel-Kinematics Micropositioner with Controller

M-824 Compact 6-Axis-Positioning System Precision Parallel-Kinematics Micropositioner
  • Compact 6 Axis Positioner
  • Platform Driven by 6 Precision Actuators
  • Travel Ranges to 45 mm (linear), 25° (rotation)
  • Load Capacity to 10 kg, Self Locking Version
  • Resolution to 7 nm
  • Min. Incremental Motion to 300 nm
  • Repeatability ±0.5 µm
  • Velocity to 25 mm/sec

The M-824 vacuum hexapod is an ideal micro-positioning platform for complex multi-axis positioning tasks. In addition to executing 6-axis commands the hexapod also has an arbitrary center of rotation (pivot point) that can be changed with one software command.

PDF Brochure | Specs, Drawings, Part numbers





Visit PI USA website for Additional
Vacuum Precision Positioning Systems from PI miCos

Brochure: Engineered Vacuum / UHV Motion Control Systems, PI miCos.





High Force Ceramic Actuators     Ultrasonic Motor Linear Actuators     Linear Tables     Motorized Linear Actuators   
Flexure-Guided Actuators     Piezo Actuators     Controllers for Linear Actuators