Precision Vacuum Actuators

High Force Ceramic Actuators

Ultrasonic Motor Linear Actuators

Linear Tables

Motorized Linear Actuators

Flexure-Guided Actuators

Piezo Actuators

Controllers for Linear Actuators

Brochure: Engineered Vacuum / UHV Motion Control Systems, PI miCos.

Ceramic Encapsulated Piezo Stack Vacuum Actuators
		Piezo Actuators are intrinsically vacuum compatible, because of their ceramic nature. PI piezo actuators are designed to combine ultra-high performance with long lifetime in industrial and scientific applications. PDF Brochure \| Vacuum Actuator Specs & Order Info

M-227K Motorized Micrometer Vacuum Actuator
Compact Actuator Design Vacuum Compatible up to 10-6 hPa Non-Rotating Tip Closed-Loop DC-Motors The M-227KVLA Vacuum Compatible linear actuator is equipped with rotary encoder and DC-motor with gearhead PDF Brochure \| Vacuum Actuator Specs & Order Info

NEXACT® Vacuum Actuator / Linear Manipulator, Piezo Stepper Actuator
		30 mm Travel Range Long-Life Piezo Stepping Drive, Ideal for Micro- and Nano-Manipulation Integrated Linear Encoder Option Very High Acceleration, e.g. for Cell Penetration Two Operating Modes: Continuous Stepping Mode and Continuously Variable, High-Dynamics Analog Mode for 30 pm Resolution** Up to 10 N Force Generation Self-Locking at Rest, no Heat Generation Smooth Motion, no Closed-Loop Jitter Vacuum-Compatible and Non-Magnetic Versions N-381 piezo stepper linear actuator for sample positioning and manipulation provides long travel, high speed and very high resolution. Shown with C-861 controller PDF Brochure \| Vacuum Actuator Specs & Order Info

OEM Miniature Vacuum Actuator Linear Motor with PiezoWalk Drive
Resolution to 0.03 nm 10 to 125 mm Travel Ranges Compact and Cost-Effective Design To 10 N Push/Pull Force Low Operating Voltage (40V) Self-Locking at Rest, No Head Dissipation, Nanometer Stability Non-Magnetic and Vacuum-Compatible Working Principle N-310 PiezoWalk® linear drives feature travel ranges of up to 125 mm and push/pull force capacities to 10 N in a compact package of only 25 x 25 x 12 mm. With their high resolution, NEXACT® drives, are ideal for high-precision positioning over long travel ranges. The N-310 can be operated in open-loop and closed-loop mode (with the addition of an external position sensor). A variety of NEXACT® controllers facilitates the integration into micro- or nanopositioning applications. PDF Brochure \| Vacuum Actuator Specs & Order Info

N-111 OEM Linear Vacuum Actuator PiezoWalk® Principle
		Non-Magnetic and Vacuum-Compatible Working Principle Cleanroom Compatible Travel Range 10 mm Resolution to 0.025 nm to 70 N Holding Force, to 50N Force Generation Self Locking at Rest, No Heat Generation The N-111 NEXLINE® OEM linear actuator operating principle is based on coordinated motion of a number of preloaded linear and shear piezo elements acting on a runner. NEXLINE® drives combine long travel ranges with piezo-class precision. Closed-loop and open loop models are available. In open-loop operation position resolution down to 25 pico-meters can be achieved. PDF Brochure \| Piezo Actuator Specs & Order Info

N-216 PiezoWalk High-Force Ceramic Vacuum Actuator / Linear Motor
Cleanroom Compatible Non-Magnetic and Vacuum-Compatible Working Principle 800 N Holding Force Travel Range 20 mm Resolution to 0.03 nm Self Locking at Rest NEXLINE® drives combine long travel ranges with piezo-class precision. The N-216 is a high-end actuator for high-energy physics, semiconductor and nanotechnology applications with extreme precision and life time requirements. PDF Brochure \| Vacuum Actuator Specs & Order Info

M-663K Miniature Rodless Vacuum Actuator / Positioning Table with Ceramic Motor
		Smallest High-Speed Positioning Table with Closed-Loop Linear Motor and Encoder Travel Range 19 mm Vacuum Compatible up to 10-6 hPa Direct Metrology Linear Encoder Resolution 0.1 µm XY Combinations The M-663KVLS Linear table is vacuum compatible to 10^-6 hPa Request Information, Quote on M-663 Vacuum Stage

< P-733.2UD Non-Magnetic XY Piezo Flexure Table for UHV to 10^-9 hPa
Resolution to 0.1 nm with Capacitive Sensors, Ideal for Super-Resolution Microscopy Travel Ranges to 100 x 100 µm in X,Y & to 10 µm in Z Frictionless, High-Precision Flexure Guiding System High-Speed Versions with Direct Drive Parallel Kinematics for Better Multi-Axis Accuracy and Dynamics Parallel Metrology for Active Trajectory Control Clear Aperture for Microscopy The P-733 XY piezo stage provides very high-dynamics and resolution to 0.1 nanometers. It can be used for semiconductor metrology, AFM, scanning and ultra-high precision alignment applicaitons. PDF Brochure \| Vacuum Actuator Specs & Order Info

Vacuum Compatible 6-Axis-Stage - Hexapod
		Compact 6 Axis Stage Platform Driven by 6 Precision Actuators Travel Ranges to 45 mm (linear), 25° (rotation) Load Capacity to 10 kg, Self Locking Version Resolution to 7 nm Min. Incremental Motion to 300 nm Repeatability ±0.5 µm Velocity to 25 mm/sec The M-824 vacuum compatible 6-axis stage is based on 6 parallel actuators. Its flexibility makes it ideal for complex multi-axis positioning tasks. In addition to executing 6-axis commands the hexapod also has an arbitrary center of rotation (pivot point) that can be changed with one software command. PDF Brochure \| Vacuum 6-Axis Stage Specs & Order Info

Visit PI USA website for Additional Vacuum Precision Positioning Systems from PI miCos
		Brochure: Engineered Vacuum / UHV Motion Control Systems, PI miCos.