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| Ceramic & Classical Linear Actuators for Precision Motion Control
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| NEXLINE® / NEXACT® Nanopositioning Linear Actuators |
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| N-310 Compact NEXACT® OEM Piezo Stepping Motor Actuator
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- 10 mm/sec Speed
- 20 mm Standard Travel Range
- Compact and Cost-Effective Design
- 0.03 nm Resolution
- To 10 N Push/Pull Force
- Low Operating Voltage (40 V)
- Self Locking, with no Heat Dissipation, Nanometer Stability
- Non-Magnetic and Vacuum-Compatible Working Principle
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| N-111 NEXLINE® Compact High Force Piezo Stepping Linear Motor Actuator
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- Winner of the SEMI Technology Innovation Showcase Award
- 5 mm Travel Range
- <0.1 Nanometer Resolution
- Active Force Generation to 30 N
- >50 N Holding Force Self-Locking
- Non Magnetic Option
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PDF Datasheet
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HTML Online Catalog Datasheet
N-111
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| N-214 NEXLINE® High-Load Piezo Stepping Linear Motor Actuator
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- Winner of the SEMI Technology Innovation Showcase Award
- 20 mm Travel Range, <0.1 Nanometer Resolution
- Integrated High-Resolution Incremental Encoder
- Active Force Generation to 400 N
- >600 N Holding Force, Self-Locking
- Non Magnetic Option
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PDF Datasheet
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HTML Online Catalog Datasheet
N-214
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| Ultrasonic Linear Actuators / Motors |
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| M-674 PILine® RodDrive PiezoMotor Actuators
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- Drive-Component for Integration into Precision Positioning Systems
- Flexible Choice of Travel Ranges to Several 100 mm
- Flexible Choice of Push/Pull Forces to Several 10 N
- Minimum Incremental Motion to 50 Nanometers
- Velocity to 400 mm/s
- Self-Locking
- Non Magnetic Option
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| P-652 PILine® Sub Miniature Piezomotor Actuator for High Volume Applications
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- Cost-Effective, High-Volume-Production Drive
- Piezo Micro-Motor: 9.0 x 6.5 x 2.4 mmł
- Travel Range 3.2 mm
- Velocity to 80 mm/s
- Self-Locking
- Non Magnetic Option
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PDF Datasheet
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HTML Online Catalog Datasheet
P-652
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| P-653 PILine® Miniature Linear Motor / Slide
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- True Linear Motor Slide / No Rotary Conversion Losses
- Cost-Effective OEM Drive for High Quantity-Applications
- Preassembled and Mounted on a PCB Board
- Very Compact: Piezomotor Drive is Only 8 mm Long
- Fast Response: Full Stroke in <50 ms
- Force Generation to 0.15 N
- Self Locking at Rest
- Travel Range 2 mm, Velocity up to 200 mm/s
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PDF Datasheet
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HTML Online Catalog Datasheet
P-653
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| P-661 PILine® Miniature High-Speed, Ultrasonic Piezo Linear Motor for OEMs
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- Patented Principle Features Very Compact Dimensions
- Velocity to 600 mm/s
- Acceleration to 15 g
- Minimum Incremental Motion to 50 Nanometers
- Self-Locking to 1.5 N
- 20000 h MTBF
- Non Magnetic Option
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PDF Datasheet
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HTML Online Catalog Datasheet
P-661
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| M-661 - M-662 PILine® Miniature Liner Stage with Ultrasonic Piezo Linear Motor Actuators
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- 20 mm Travel Range
- Velocity to 500 mm/s
- Acceleration to 20 g
- Resolution to 50 Nanometer
- Self-Locking
- XY-Combinations Available
- 20000 h MTBF
- Vacuum Versions to 10-7 hPa
- Non Magnetic Option
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| M-663 PILine® Miniature Translation Stages with Closed-Loop Ultrasonic Piezo Linear Motor Actuators
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- Smallest Translation Stage with Closed-Loop Linear Motor Drive and Linear Encoder
- 20 mm Travel Range
- Velocity up to 500 mm/s
- Accelerations up to 20 g
- Resolution to 100 Nanometers
- Integrated Direct-Metrology Linear Encoder
- AutoLock Feature
- XY Combinations Available
- 20000 h MTBF
- Vacuum Versions Available
- Non Magnetic Option
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PDF Datasheet
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HTML Online Catalog Datasheet
M-663
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| M-664 PILine® Low-Profile High-Speed Translation Stage with Linearencoder
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- Travel Range 25 mm
- Max. Velocity 400 mm/s
- Ultra-Low Profile, 15 mm
- Direct Metrology Linear Encoder with 0.1 µm Resolution
- High Guiding Accuracy with Crossed Roller Bearings
- Compact XY Combinations
- Piezo Linear Motor with 6 N Drive Force
- Self Locking at Rest
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PDF Datasheet
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HTML Online Catalog Datasheet
M-664
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| Translation Stages |
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| Fast Miniature Linear Translation Stage with Integrated Optical Linear Encoder |
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- Travel Range 25 mm
- 0.1 µm Optical Linear Encoder for Highest Accuracy & Repeatability
- Min. Incremental Motion to 0.2 µm
- Max. Velocity 20 mm/s
- Cross-Roll Bearings
- Recirculating Ball Screw Drives Provide High Speeds & Long Lifetimes
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| M-413 High-Load Translation Stages for Cost-Sensitive Precision Positioning Applications
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- For Cost-Sensitive Precision Positioning Applications
- Travel Ranges 100 to 300 mm
- Resolution to 0.018 µm
- Min. Incremental Motion to 0.1 µm
- Preloaded Precision Leadscrew or Recirculating Ball Screw Drives Provide High Speeds & Long Lifetimes
- Stress-Relieved Aluminum Base for Highest Stability
- Vacuum-Compatible Versions Available
- M-413 and M-414 Versions for Reduced Load Requirements
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PDF Datasheet
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HTML Online Catalog Datasheet
M-413
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Motorized Actuators
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| M-227 High-Resolution DC-Mike Actuators
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- 10, 25 & 50 mm Travel Ranges
- 50 Nanometers Minimum Incremental Motion
- Non-Rotating Tip
- Closed-Loop DC Motor
- Compatible with Leading Industrial Motion Controllers
- Sub-Nanometer Resolution with Optional PZT Drive
- >5,000 Hours MTBF
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PDF Datasheet
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HTML Online Catalog Datasheet
M-227
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| M-228 Stepper-Mike Linear Actuator with Limit Switches
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- Cost-Effective Design
- 10 mm Travel Range
- 46 nm Resolution with C-663 Controller
- Non-Rotating Tip
- Max. Velocity 1.5 mm/s
- Non-contact Limit and Reference Switches
- Compact Design
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| M-230 High-Resolution Closed-Loop DC-Mike & Stepper Actuators
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- 10 & 25 mm Travel Range
- 50 Nanometers Minimum Incremental Motion
- Non-Rotating Tip
- Velocity to 2 mm/sec.
- Closed-Loop DC Motors and Stepper Motors
- Compatible with Leading Industrial Motion Controllers
- Integrated Hall-Effect Origin and Limit Switches
- Front Mount or Clamp Mount
- >5,000 Hours MTB
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| M-231 High-Resolution Closed-Loop DC-Mike Actuators
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- 17 mm Travel Range
- 100 Nanometers Minimum Incremental Motion
- Velocity up to 2.5 mm/sec.
- Closed-Loop DC Motor
- Compatible with Leading Industrial Motion Controllers
- Integrated Hall-Effect Origin and Limit Switches
- Fits M-105 & F-110 Fiber Aligners
- >5,000 Hours MTBF
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PDF Datasheet
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HTML Online Catalog Datasheet
M-231
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| M-232 Compact, High-Resolution, Closed-Loop DC-Mike Actuator
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- 17 mm Travel Range
- 100 Nanometers Minimum Incremental Motion
- Velocity up to 2.5 mm/sec.
- Closed-Loop DC Motor
- Compatible with Leading Industrial Motion Controllers
- Integrated Hall-Effect Limit and Origin Switches
- Fits M-105 & F-110 Fiber Aligners
- >5,000 Hours MTBF
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PDF Datasheet
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HTML Online Catalog Datasheet
M-232
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| M-235 Heavy-Duty High-Resolution Closed-Loop DC-Mike & Stepper Actuators
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- 20 mm or 50 mm Travel Range
- 100 Nanometers Minimum Incremental Motion
- High-Speed Direct Drive Option
- 120 N Push/Pull Load
- 100 N Lateral Load Limit
- Preloaded Ultra-Low-Friction Ball Screw with Non-Rotating Tip
- Closed-Loop DC Motors and Stepper Motors
- Compatible with Leading Industrial Motion Controllers
- Integrated Hall-Effect Limit & Origin Switches
- >20,000 Hours MTBF
- Vacuum Versions
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| M-238 Heavy-Duty Precision Linear DC-Motor Actuator
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- High Load Capacity to 400 N
- Optional 100 Nanometers Direct Metrology Linear Encoder for Exceptional Precision
- Travel Range to 50 mm
- Max. Velocity: 30 mm/s
- Preloaded Frictionless Ball Screw
- MTBF >20.000 h
Vacuum-Compatible Versions Available for 10-6 hPa
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PDF Datasheet
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HTML Online Catalog Datasheet
M-238
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| M-168 High-Resolution Stepper-Mike Actuators
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- 10, 25 & 50 mm Travel Ranges
- Resolution <100 Nanometers
- 2- and 5-Phase Stepper Motor
- Manual Positioning Knob
- Sub-Nanometer Resolution with Optional PZT Actuator
- >5,000 Hours MTBF
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PDF Datasheet
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HTML Online Catalog Datasheet
M-168
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| M-631 Precision Micrometer Actuators
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- 10, 25 and 50 mm Travel
- Pitch 0.5 mm/Rev.
- Low-Friction Construction
- 1 Micron Manual Sensitivity
- Sub-Nanometer Resolution with Optional PZT Actuator
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Flexure-Guided Nanopositioning Actuators
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| P-601 PiezoMove® High-Precision Lever Amplified Z-Actuator with Flexure Guiding
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- Flexure Guidance for Frictionless, Ultra-Straight Motion
- Travel Ranges to 480 Microns
- Resolution to 0.2 Nanometers
- High Dynamics and Stiffness
- PICMA® High-Performance Piezo Actuators
- Open and Closed-Loop Versions
- Ideal for OEM Applications
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PDF Datasheet
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HTML Online Catalog Datasheet
P-601
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| P-783 Piezoelectric Z-Nanopositioning Stage / Actuator with Direct Metrology
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- Z-Axis Travel to 300 Micron
- Low Profile
- Frictionless Precision Flexure Guiding System
- Internal Motion Amplifier
- Closed-Loop Resolution <10 Nanometer
- PICMA® High-Performance Multilayer Piezo Drives
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| P-290 Long-Travel Piezoelectric Z-Nanopositioning Flexure Stage / Actuator
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- Vertical Travel to 1000 Micron
- Integrated Double-Flexure Motion Amplifier
- Non-Magnetic Stainless Steel Design
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PDF Datasheet
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HTML Online Catalog Datasheet
P-290
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| P-753 LISA Piezoelectric NanoAutomation® Stages / Actuators with Direct Metrology
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- Unique Design: Both Stage and Actuator
- Frictionless Precision Flexure Guiding System
- 0.05 Nanometer Resolution
- Direct Metrology with Capacitive Sensors for Highest Precision
- Ultra-Fast Response, Very Compact
- PICMA® High-Performance Multilayer Piezo Drives
- ID-Chip for Auto Calibrate Function
- Vacuum Versions Available
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PDF Datasheet
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HTML Online Catalog Datasheet
P-753
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| P-62x.1 PIHera® Miniature Long-Range Piezo Nanopositioning Stages with Direct Metrology
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- Travel to 1800 µm
- Compact Design
- Resolution <1 nm
- Frictionless Precision Flexure Guiding System
- PICMA® High-Performance Piezo Drives
- Direct Metrology with Capacitive Sensors for Highest Precision
- Up to 0.02% Position Accuracy
- X, XY, Z, XYZ Versions
- Vacuum-Compatible Versions
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PDF Datasheet
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HTML Online Catalog Datasheet
P-62x.1
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Piezo Actuators
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| P-882 – P-888
PICMA® High-Performance Monolithic Multilayer Piezo Actuators
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- Award-Winning Technology
- Low Operating Voltage
- Superior Lifetime Even Under Extreme Conditions
- Very Large Operating-Temperature Range
- High Humidity Resistance
- Excellent Temperature Stability
- High Stiffness
- UHV Compatible to 10-9 hPa
- Sub-Millisecond Response & Sub-Nanometer Resolution
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| P-212 · P-216 Preloaded PICA™ Power Piezo Translators |
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- Travel Range to 180 µm
- Pushing Forces to 4500 N
- Pulling Forces to 500 N
- Sub-ms Response
- Sub-Nanometer Resolution
- Options: Vacuum, High- and Low-Temperature
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| P-225 · P-235 Preloaded PICA™ Power High-Load Piezo Actuators
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- Extremely High Stiffness
- Pushing Forces to 30,000 N
- Pulling Forces to 3500 N
- Travel Range to 120 µm
- Options: Versions for Vacuum, High- and Low-Temperatures and with Water-Resistant Case
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| P-840
Preloaded Piezo Translators (LVPZT)
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- Displacement to 90 µm
- Pushing Forces to 1000 N
- Preloaded for Pulling Forces to 50 N
- Sub-msec Response
- Sub-Nanometer Resolution
- Options: Ball Tip, Vacuum Versions
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| P-007 – P-056
PICA™-Stack / High Force Piezoceramic Actuators
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- High Load Capacity to 100 kN
- High Force Generation to 80 kN
- Large Cross Sections to 56 mm Diameter
- Variety of Shapes
- Extreme Reliability >1000,000,000 Cycles
- Proven and Flexible Design
- Sub-Nanometer-Resolution / Sub-Millisecond-Settling-Time
- Vacuum-Compatible Versions
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Motor Controllers
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| C-866
High-Speed, Closed-Loop Controller / Driver for PILine® Ultrasonic Piezo Linear Motors
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- Optimized for PILine® Piezo Linear Motors
- High-Speed Encoder Input
- PID Servo Algorithm with Dynamic Parameter Switching
- Integrated Piezomotor Drive Electronics
- 3 TTL-Inputs, 3 TTL-Outputs
- Analog Input
- Extensive Software Support
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| C-663 / C-863 Mercury™ DC-Motor Controller / Stepper Motor / Driver with Network Feature |
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- High Performance at Low Cost
- Microscopy Mode for Smooth Motion
- DC Servo-Motor Controller Supplies up to 30 W
- 20 MHz Encoder Input for High Speed & Resolution
- Macro Programmable Stand-Alone Functionality
- Network Capability for Multi-Axis Applications
- Non-Volatile EEPROM for Macros and Parameters
- Digital I/O Lines (TTL)
- Motor-Brake Control
- USB and RS-232 Interface
- Optional Joystick for Manual Control
- Works with All PI Micropositioners
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C-663 PDF Datasheet
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HTML Online Catalog Datasheet
C-663
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C-863 PDF Datasheet
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HTML Online Catalog Datasheet
C-863
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| C-843 Servo Motion Controller/Driver PCI Board for 2 / 4 Axes
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- Two and Four Axis Version
- Very Cost-Effective: Servo Amplifiers On-Board
- Additional PWM Outputs for High-Power Motors
- Trapezoidal Curve, S-Curve and Velocity Profile
- 32 kSamples RAM for High-Speed Buffer Operations
- 16 I/O Lines for Flexible Automation
- Fast PCI communication, 120 µs for position read
- Motor-Brake Control Output
- Extensive Software Support
- General Command Set (GCS) Compatible
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PDF Datasheet
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HTML Online Catalog Datasheet
C-843
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| E-861 PiezoWalk® NEXACT® Controller/Driver
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- For NEXACT® Drives and Positioning Systems
- Complete System with Controller, Integrated Power Amplifiers and Software
- Open-Loop Operation, or Closed-Loop with Linear Encoder
- High Performance at Low Cost
- Daisy-Chain Networking for Multi-Axis Operation
- Non-Volatile Macro Storage for Stand-Alone Functionality with Autostart Macro
- I/O for Automation, Joystick for Manual Operation
- Parameter Changes On-the-Fly
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PDF Datasheet
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HTML Online Catalog Datasheet
E-861
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Piezo Controllers
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| E-712
Modular Digital Piezo Controller System, up to 6 AxesModular Digital Piezo Controller System, up to 6 Axes
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- Digital Controller of the Newest Generation: 600 MHz Processor; up to 50 kHz Sensor Update Rate; Highly Stable 20-bit D/A Converters
- Real-Time Operating System for Excellent Trajectory Control
- Modular Design for Greatest Flexibility in Meeting Custom Requirements
- Auto-Calibrating from Stage ID-Chip for Interchangeability of Controller and Mechanics w/o Recalibration
- Flexible Interfacing: USB, RS-232 & Ethernet
- Optional High-Bandwidth Analog Inputs and Outputs
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| E-500 · E-501 Modular Piezo Control Systems (HVPZT & LVPZT |
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- For High- and Low-Voltage Piezo Systems
- 19- and 9.5-Inch Chassis
- Optional Position Servo-Control Modules
- Optional Display and RS-232 & IEEE 488 Interface Module
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| E-481 High-Power PICA™ HVPZT Piezo Amplifier / Controller with Energy Recovery
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- Peak Power 2000 W
- Energy Recovery
- Output Voltage 0 to ±1000 V or Bipolar
- Optional Position Servo-Control Modules
- Computer Interface & Display Modules
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PDF Datasheet
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HTML Online Catalog Datasheet
E-481
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| E-625 Compact LVPZT Piezo Amplifier & Servo-Controller with High-Speed RS-232 Interface
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- Integrated 20-Bit High-Speed RS-232 Interface
- Network Capability with up to 4 Channels
- For Capacitive, LVDT and Strain Gauge Position Sensors
- Wave Table for User-Defined Curves
- GCS (General Command Set) Compatible
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PDF Datasheet
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HTML Online Catalog Datasheet
E-625
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