Flexure-Guided (Flextensional) Piezo Linear Actuators

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Piezo Flexure-Guided Actuators (Flextensional Actuators) provide nanometer precison, fast response and travel ranges to 1000Ám and more.
They are completely frictionless don't require lubricants or maintenance and have lifetimes of several billion cycles.

PI provides open-loop flextensional actuators (for applications where the absolute position is not critical) and closed-loop actuators with internal position sensors, for nanometer repeatability.
Flexure actuators are often used for microfluidics, fast (medical) pumps, microdispensing applications and as drive components in nanopositioning tables and actuators.


P-753 Flexure-Guided Direct-Drive Piezo Linear Actuator: Closed-Loop & High-Dynamics
P-753 Linear Actuator and Stage
  • Ultra-High Precision Flextensional Actuator with Direct Drive
  • 50 Picometer Resolution, Rapid Response
  • Capacitive Sensor Feedback for Highest Linearity and Precision
  • Frictionless Precision Flexure Guidance for Frictionless, Ultra-Straight Motion
  • Ceramic Encapsulated Piezo Actuators Guarantee Outstanding Lifetime
  • Vacuum-Compatible and Nonmagnetic Versions Available

These high-speed nanopositioners can be used both as both linear actuators and translation tables. They are equipped with capacitive feedback sensors, frictionless, flexure guiding systems and high-performance piezo drives providing a positioning and scanning range of up to 38 Ám with very fast settling time and extremely straight motion.

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P-601 PiezoMoveÖ Flextensional Actuator to 400 Ám Positioning Range
  • Flextensional Z-Actuator with integrated Motion Amplifier
  • Target Applications: Optics, Medical, Biotech and Microfluidics
  • Maintenance free, no Lubricants, no Wear & Tear
  • Sub-Millisecond Responsiveness
  • To 400 Ám Positioning range
  • Flexure Guidance for Frictionless, Ultra-Straight Motion
  • Sub-Nanometer Resolution
  • High Stiffness = High Dynamics
  • Non-Magnetic Versions Feasible
  • Ceramic Encapsulated Piezo Actuators Guarantee Outstanding Lifetime
  • Closed-Loop Option for Highest Precision

These motion-amplified, flexure-guided piezo actuators provide large vertical positioning ranges to 400 Ám, fast response and high positioning accuracy in a very small package. With settling times of only a few milliseconds and a resolution in the sub-nanometer range they are well suited for both static and dynamic applications.

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P-601 Flexure-Guided OEM Piezo Actuator




P-602 Long Travel Flexure Actuators: 100 Ám to 1 mm Positioning Ranges
P-602 Linear Actuator
  • Flextensional Piezo Actuator with integrated Motion Amplifier
  • Maintenance free, no Lubricants, no Wear & Tear
  • Sub-Millisecond Responsiveness
  • Choice of Positioning Rang from 100 Ám to 1000 Ám
  • Frictionless Motion Amplifier and Flexure Guiding System for Straight Motion
  • Maintenance free, no Lubricants, no Wear & Tear.
  • High Dynamics and Stiffness, Forces to 400 N, Backlash-Free Construction
  • Ceramic Encapsulated Piezo Actuators Guarantee Outstanding Lifetime
  • Closed-Loop Option for Highest Precision
  • Custom Designs with Larger Travel or Faster Response and Non-Magnetic Versions Feasible
  • Target Applications: Optics, Medical, Biotech and Microfluidics

These flexure-guided piezo actuators integrate a frictionless high-efficiency motion amplifier to combine large positioning ranges up to 1 millimeter with high stiffness and very fast response. The integrated flexure guide saves the cost for additional guiding systems when integrating these actuators.

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P-603 Low-Cost Piezo Flexure Linear Actuator
  • Flextensional Piezo Actuator with integrated Motion Amplifier
  • Cost-Effective Design
  • Sub-Millisecond Responsiveness
  • Maintenance free, no Lubricants, no Wear & Tear
  • Frictionless, High-Precision Flexure Guiding System
  • Positioning ranges to 500 Ám
  • Ceramic Encapsulated Piezo Actuators Guarantee Outstanding Lifetime
  • Closed-Loop Option for Highest Precision
  • Custom Designs Feasible
  • Target Applications: Optics, Medical, Biotech and Microfluidics

These piezo flexure linear actuators were designed for cost-sensitive OEM applications. The integrated flexure guides save the cost for additional guiding systems when integrating these actuators in micro-dispensing devices, pumps or servo valves.

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P-603 PiezoMove Linear Actuator




P-290 Flexure Guided Piezo-Z Actuator
P-290 Long-Travel Piezoelectric Z-Nanopositioning Flexure Table / Actuator
  • Flextensional Z-Actuator with integrated Double Motion Amplifier
  • 1000 Ám Travel Range in Z
  • Non-Magnetic Stainless Steel Option

This flexure actuator provides 1000 Ám Z-travel. It is designed for high-resolution static and low-dynamic positioning applications.

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More Piezo Flexure Positioners




High Force Ceramic Actuators     Ultrasonic Motor Linear Actuators     Linear Tables     Piezo Actuators    
Motorized Linear Actuators    Vacuum Actuators & Custom Actuators     Controllers for Linear Actuators