Ceramic Encapsulated Piezo Stack Vacuum Actuators | ||
PI piezo actuators are designed to combine ultra-high performance with long lifetime in industrial and scientific applications. PDF Brochure | Vacuum Actuator Specs & Order Info | ||
M-227K Motorized Micrometer Vacuum Actuator | ||
The M-227KVLA Vacuum Compatible linear actuator is equipped with rotary encoder and DC-motor with gearhead PDF Brochure | Vacuum Actuator Specs & Order Info |
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NEXACT® Vacuum Actuator / Linear Manipulator, Piezo Stepper Actuator | ||
N-381 piezo stepper linear actuator for sample positioning and manipulation provides long travel, high speed and very high resolution. Shown with C-861 controller PDF Brochure | Vacuum Actuator Specs & Order Info | ||
OEM Miniature Vacuum Actuator Linear Motor with PiezoWalk Drive | ||
N-310 PiezoWalk® linear drives feature travel ranges of up to 125 mm and push/pull force capacities to 10 N in a compact package of only 25 x 25 x 12 mm. With their high resolution, NEXACT® drives, are ideal for high-precision positioning over long travel ranges. The N-310 can be operated in open-loop and closed-loop mode (with the addition of an external position sensor). A variety of NEXACT® controllers facilitates the integration into micro- or nanopositioning applications. PDF Brochure | Vacuum Actuator Specs & Order Info |
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N-111 OEM Linear Vacuum Actuator PiezoWalk® Principle | ||
The N-111 NEXLINE® OEM linear actuator operating principle is based on coordinated motion of a number of preloaded linear and shear piezo elements acting on a runner. NEXLINE® drives combine long travel ranges with piezo-class precision. Closed-loop and open loop models are available. In open-loop operation position resolution down to 25 pico-meters can be achieved. PDF Brochure | Piezo Actuator Specs & Order Info | ||
N-216 PiezoWalk High-Force Ceramic Vacuum Actuator / Linear Motor | ||
NEXLINE® drives combine long travel ranges with piezo-class precision. The N-216 is a high-end actuator for high-energy physics, semiconductor and nanotechnology applications with extreme precision and life time requirements. |
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M-663K Miniature Rodless Vacuum Actuator / Positioning Table with Ceramic Motor | ||
The M-663KVLS Linear table is vacuum compatible to 10-6 hPa Request Information, Quote on M-663 Vacuum Stage | ||
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P-733.2UD Non-Magnetic XY Piezo Flexure Table for UHV to 10-9 hPa | ||
The P-733 XY piezo stage provides very high-dynamics and resolution to 0.1 nanometers. It can be used for semiconductor metrology, AFM, scanning and ultra-high precision alignment applicaitons. PDF Brochure | Vacuum Actuator Specs & Order Info |
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Vacuum Compatible 6-Axis-Stage - Hexapod | ||
The M-824 vacuum compatible 6-axis stage is based on 6 parallel actuators. Its flexibility makes it ideal for complex multi-axis positioning tasks. In addition to executing 6-axis commands the hexapod also has an arbitrary center of rotation (pivot point) that can be changed with one software command. PDF Brochure | Vacuum 6-Axis Stage Specs & Order Info | ||
Visit PI USA website for Additional | ||
Brochure: Engineered Vacuum / UHV Motion Control Systems, PI miCos.
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High Force Ceramic Actuators
Ultrasonic Motor Linear Actuators
Linear Tables
Motorized Linear Actuators Flexure-Guided Actuators Piezo Actuators Controllers for Linear Actuators |